IPM RAS / Structure / Staff / Salashchenko Nikolay

Salashchenko Nikolay

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Head of the Multilayer X-ray optics department, principial research associate, Dr. Sci, corresponding member of RAS.

Personal data

Born on November 1, 1941 in Ussuriysk.

Research interests

Physics and technology of multilayer «X-ray optics», the application of multilayer optics in physical experiments and scientific instrumentation.

Scientific activity includes optimization of multilayer structures for X-ray optics and the development of methods of diagnosis, the study of physical processes in multilayer structures based on ultrathin metal layers, the development of technology of x-ray optics elements, development stands to diagnose the MCC to monitor and correct the shape of the surface of the X-ray optical elements with subnanometer precision projection X-ray microscopy and X-ray nanolithography.

Awards

  • Laureate of the USSR state prize (1991);
  • Laureate of A. G. Stoletov prize (2008).

Other information

Member of the Scientific Council of IPM RAS, member of dissertation councils of IPM and UNN (Department of Physics), member of the editorial board of «Poverhnost» journal, supervisor of scientific school «Development of physical basis for plating of metastable multilayered and nanoclaster film structures, investigations of their properties».

Publications

  • S.V.Gaponov, B. M. Luskin, N. N. Salashchenko. Homoepitaxialsuperlatticeswithnonorientedbarrierlayers. // Solid State Communication, v.39. 1981, p.301−302.
  • S.V.Gaponov, S. A. Gusev, E. S. Gluskin, B. M. Luskin, N. N. Salashchenko. Longwavex-rayradiationmirrors. // Optics Communication, v.38/1, p. 7 (566), 1981.
  • S.V.Gaponov, E. S. Gluskin, S. A. Gusev, Yu. Ya. Platonov, N. N. Salashchenko. Spherical and plane multilayer normal incidence mirrors for soft x-rays. // Optics commun., v.48, № 4, 1983, p.229−232.
  • E.S.Gluskin, S. V. Gaponov, P. Dehz, P. P. Il’insky, N. N. Salashchenko. Apolarimeterforsoftx-rayandVUVradiation. // Nuclear Instruments and Methods in Physics Research. A246,№ 1−3, 1986, р.394−396.
  • A.D.Akhsakhalyan, S. V. Gaponov, S. A. Gusev, Yu. Ya. Platonov, N. N. Salashchenko, N. I. Polushkin. Multilayerx-raymirrorsforthewavelengthrange 25−44A. // Nuclear Instruments and Methods in Physics Research. A261, 1987, p.75−77.
  • A.A.Fraerman, S. V. Gaponov, V. M. Genkin, N. N. Salashchenko. The effect of the interfacial roughness on the reflection properties of multilayer x-ray mirrors. // Nuclear Instruments and Methods in Physics Research. A261,1987, p.91−98.
  • A.D.Akhsakhalyan, A. A. Fraerman, Yu. Ya. Platonov, N. I. Polushkin, N. N. Salaschenko. Diffusion in the multilayer structures of metal-carbon super thin films. //Thin Solid Films, 207 (1992), 19−23.
  • S.I.Zheludeva, M. V. Koval’chuk, N. N. Novikova, A. D. Akhsakhalyan, Yu. Ya. Platonov, N. N. Salashchenko. Thickness and density determination of ultrathin solid films complising multilayer X-ray mirrors by x-ray reflection and fluorescence study. //Rev. Sci. Instr., 1992, v. 63 (1), p.1519−1522.
  • S.A.Akhmanov, I. M. Bayanov, S. V. Gaponov, Yu. Ya. Platonov, Yu. V. Ponomarev, A. B. Savel’ev, N. N. Salashchenko. Focusing of picosecound X-ray pulses on the target a power density up to 1 GW/cm2. //Proceed. SPIE, v. 1800, (1992), p.138−145.
  • S.V.Bobashev, A. D. Mosesyan, Yu. Ya. Platonov, N. N. Salashcenko, D. M. Simanovsky, A. A. Sorokin, L. A. Shmaenok. Intensive laser plasma source of quasimonochromatized soft X-ray radiation with focusing miltilayer mirrors // Proceed. SPIE, v.1800, p.164−175 (1992).
  • A.L.Chumakov, G. V. Smirnov, J. Arthur, S. L. Rude, D. E. Brown, A. Q. R. Raron, G. S. Rroun, N. N. Salashchenko. Resonant Diffraction of Synchrotron Radiation by a Nuclear multilayer. //Phys. Rev. Lett., v.71, № 15, 1993, p.2489−2492.
  • S.I. Zheludeva, M. V. Kovalchyk, N. N. Novikova, A. N. Sosphenov, N. E. Malysheva, N. N. Salashchenko, A. D. Akhsakhalyan, Yu. Ya. Platonov. New modification of XRSW a both the surface of layered substrate under total external reflection conditions for structure characterization of organic layers. // Thin Solid Films, 1993, V.232, p.252−256.
  • N.I.Polushkin, N. N. Salashchenko. Magnetic behavior modification of Fe/С composition-modulated films under the short pulsed heat action. // Magn. Mater., 124 (1993), p.347−354.
  • A.D.Akhsakhalyan, N. N. Kolachevsky, M. M. Mitropolsky, E. M. Ragozin, N. N. Salashchenko, V. A. Slemzin. Fabrication and Investigation of imaging Normal-Incidennce Multilayer Mirrors with a Narrov-Band Reflection in the Range 4,5nm.// Phisica Scripta, Vol.48, 566−570, 1993.
  • A. Slemzin, I. A. Zhitnik, E. N. Ragozin, A. A. Andreev, N. N. Salashchenko, Yu. Ya. Platonov. Aspherical imaging multilayer mirrors with sub-areseconnd resolution for solar XUV-telescope. // SPIE Proc., V.2279, 1994, p. 234.
  • N.N.Salashchenko, Yu. Ya. Platonov, S. Yu. Zuev. Multilayer x-ray optics for synchrotron radiation. // Nuclear Instruments and Methods in Physics Research. 1995, A359, p.114−120.
  • S.I.Zheludeva, M. V. Kovalchuk, N. N. Novikova, A. N. Sosphenov, N. E. Malysheva, N. N. Salashchenko, A. D. Akhsakhalyan, Yu. Ya. Platonov, R. I. Cernik, S. R. Colluns. New method of ultra-thin film characterization applied to the investigation of C/Ni/C structures under heat load. //Thin Solid Films, 1995, v.529, p. 131−138.
  • F.Bijkerk, L. A. Shmaenok, E. Louis, H. J. Voorma, N. B. Koster, C. Bruineman, R. K. F. J. Bastiaensen, E. W. J. M. van der Drift, J. Romijn, L. E. M. de Groot, B. A. C. Rousseeuw, T. Zijlstra, Yu. Ya. Platonov, and N. N. Salashchenko. Extreme UV lithography, a new laser plasma target concept and fabrication of multilayer reflection masks. //Microelectron. Engineering, 30 (1996) 183−186.
  • Yu. Bluakhman, N. I. Polushkin, A. D. Akhsakhalyan, S. A. Gusev, N. N. Salashchenko, V. G. Semenov. Magnetic ordering inclustered Fe-based materials synthesized from laser plasma. //J. Appl. Phys., 79 (1996), 4625.
  • L.A.Shmaenok, Yu. Ya. Platonov, N. N. Salashchenko, A. A. Sorokin, D. M. Simanovsky, A. V. Golubev, V. P. Belik, S. V. Bobashev, F. Bijkerk, E. Louis, F. G. Meijer, B. Etlisher, A. Ya. Grudsky, Multilayer EUV/X-ray polichromator for plasma diagnostics. // J. Electron Spectroscopy and Related Phenomena, v. 80, 259−262, 1996.
  • A.A.Gorbunov, W. Pompe, A. Sewing, S. V. Gaponov, A. D. Akhsakhalyan, I. G. Zabrodin, I. A. Kaskov, E. B. Kluenkov, A. P. Morozov, N. N. Salashchenko, R. Dietsch, H. Mai, S. Vollmar. Ultrathin film deposition by pulsed laser ablation using crossed beams. //Applied Surface Science, (1996) 649−655.
  • N.N. Salashchenko, E. A. Shamov. Short — period X — ray multilayers based on Cr/Sc. //Optics communication, 134, N 1−6, p.7−10 (1997).
  • S.I. Zheludeva, M. V. Kovalchuk, N. N. Novikova, A. N. Sosphenov, N. N. Salashchenko, E. A. Shamov, K. A. Prokhorov, E. Burattini, G. Cappuccio. X-ray standing waves in x-ray specular reflection and fluorescence study of nano-films. //J. Appl. Crystal. 30 (1997) p. 833−838.
  • F. Schafers, H.-Ch. Mertins, I. Packe, F. Schmolla, N. N. Salashchenko, E. A. Shamov. Cr/Sc — Multilayers for the Water Window, //Applied Optics, 37, 719−728 (1998).
  • N.I. Polushkin, K. A. Prokhorov, N. N. Salashchenko, V. G. Semenov. Amorphus magnetic films for broadband g-filters of synchrotron radiation. // Nuclear Instruments and Methods in Physics Research. A. 405, 297−300 (1998).
  • N.N. Salashchenko, A. A. Fraerman, S. V. Mitenin, K. A. Prokhorov, E. A. Shamov. Short-period X-ray multilayers based on Cr/Sc, W/Sc. // Nuclear Instruments and Methods in Physics Research. A 405, 292−296 (1998).
  • A.V.Andreev, Yu. V. Ponomarev, I. R. Prudnikov, N. N. Salashchenko. X-ray diffuse scattering multilayer wevequide structures. // Phys. Rev. B, 57, N20, p.13113−13117, 1998
  • M.A. Andreeva, S. M. Irkaev, V. G. Semenov, K. A. Prokhorov, N. N. Salashchenko, A. I. Chumakov, R. Ruffer. Mossbauer reflectometry of ultrathin film Zr (10 nm) / [57Fe/Cr (3.3 nm)´26] / Cr (50 nm) using synchrotron radiation. //J. of Alloys and Compaunds 286 (1999) 322−332.
  • S.S.Andreev, H.-Ch.Mertins, Yu. Ya. Platonov, N. N. Salashchenko, F. Schaefers, E. A. Shamov, L. A. Shmaenok. Multilayer dispersion optics for x-ray radiation.// Nuclear Instruments and Methods in Physics Research. 2000, A448, 133−141.
  • S.A.Bulgakova, A. Ya. Lopatin, V. I. Luchin, L. M. Mazanova, S. A. Molodnjakov, N. N. Salashchenko PMMA-based resists for a spectral range near 13 nm // Nuclear Instruments and Methods in Physics Research. 2000, A448, 487−492.
  • L.A.Shmaenok, S. V. Golovkin, V. N. Govorun, A. V. Ekimov, N. N. Salashchenko, V. V. Pickalov, V. P. Belik, F. C. Schüller, A. J. H. Donné, A. A. M. Oomens, K. A. Prokhorov, S. S. Andreev, A. A. Sorokin, B. G. Podlaskin, L. V. Khasanov. Novel Instrumentation for Spectrally Resolved Soft X-Ray Plasma Tomography: Development and Pilot Results on TEXTOR. // Review of Scientific Instruments, Vol. 72, No. 2, 1411−1415, 2001.
  • F.Shaefers, M. Mertin, D. Abramsohn, A. Gaupp, H.-Ch.Mertins, N. N. Salashchenko. Cr/Sc nanolayers for the water window: improved performance. // Nuclear Instruments and Methods in Physics Research. A467−8, 349−353 (2001)
  • Zheng M., M. Yu, Y. Liu, R. Skomski, S. H. Liou, D. J. Sellmyer, V. N. Petryakov, Yu. K. Verevkin, N. I. Polushkin, and N. N. Salashchenko Magnetic nanodot arrays produced by direct laser interference lithography // Appl. Phys. Lett. v.79, № 16, p. 2606−2608, 2001.
  • M.A.Andreeva, V. G. Semenov, L. Häggeström, B. Lindgren, B. Kalska, A. I. Chumakov, O. Leupold, R. Rüffer, K. A. Prokhorov, N. N. Salashchenko. Interfaceselectiveinvestigationof57Fe/Crmultilayerbynuclear-resonanseBraggreflectivityontimescale. // The Physics of Metals and Metallography, Vol. 91, Suppl.1, p. 522−527.
  • S.S.Andreev, S. V. Gaponov, S. A. Gusev, E. B. Kluenkov, N. I. Polushkin, K. A. Prokhorov, N. N. Salashchenko, M. H. Haidl. Mo/Si Multilayers for 13 nm Spectral Region. // Thin Solid Films. 2002, 415/1−2, 123−132.
  • S.S. Andreev, A. D. Akhsakhalyan, M. A. Bibishkin, N. I. Chkhalo, S. V. Gaponov, S. A. Gusev, E. B. Kluenkov, K. A. Prokhorov, N. N. Salashchenko, F. Schäfers, S. Yu. Zuev. MultilayeropticsforXUVspectralregion: technologyfabricationandapplications. Centr. Europ. Journ. of Phys. 2003. № 1, p.191−209.
  • S.S. Andreev, M. S. Bibishkin, N. I. Chkhalo, E. B. Kluenkov, K. A. Prokhorov, N. N. Salashchenko, M. V. Zorina, F. Schafers and L. A. Shmaenok. Short — period multilayer X — ray mirrors. // Journal of Synchrotron Radiation. V. 10, Part 5, (2003) 358−360.
  • S.S. Andreev, M. S. Bibishkin, N. I. Chkhalo, T. Hirono, H. Kimura, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, K. A. Prokhorov, N. N. Salashchenko, N. N. Tsybin. Transmission type phase retarders based on free standing Cr/Sc multilayers // Nuclear Instruments and Methods in Physics Research. A. 2005. V. 543, 340−345.
  • M.S. Bibishkin, N. I. Chkhalo, A. A. Fraerman, A. E. Pestov, K. A. Prokhorov, N. N. Salashchenko, Yu. A. Vainer. Ultra-short period X-ray mirrors: Production and investigation. // Nuclear Instruments and Methods in Physics Research. A. 2005. V. 543, 333−339.
  • A.A. Akhsakhalyan, A. D. Akhsakhalyan, A. I. Kharitonov, E. B. Kluenkov, V. A. Murav’ev, N. N. Salashchenko. Multilayer mirror systems to form hard X-ray beams. // Central European Journal of Physics 3 (2) 2005 163−177.
  • H. Kimura, T. Hirono, Y. Tamenori, Y. Saitoh, N. N. Salashchenko, and T. Ishikawa. Transmission type Sc/Cr multilayers as a quarter-wave plate for 398.6eV. // J. Electr. Spectr. 144−147 (2005) 1079.
  • Andreev S. S., Bibishkin M. S., Chkhalo N. I., Lopatin A. Ya., Luchin V. I., Pestov A. E., Prokhorov K. A., Salashchenko N. N. Application of free-standing multilayer films as polarizers for X-ray radiation. // Nuclear Instruments and Methods in Physics Research A, 543, (2005), р. 340−345.
  • V.E. Banine, J. H. J. Moors, L. A. Sjmaenok, N. N. Salashchenko. Multi-layer spectral purity filter lithography apparatus including such a spectral purity filter and device manufacturing method, and device manufactured thereby. Date of filing 22.03.06. Priority US/29.03.05/USA 91923.
  • N.I. Chkhalo, A. Yu. Klimov, V. V. Rogov, N. N. Salashchenko, and M. N. Toropov. A source of a reference spherical wave based on a single mode optical fiber with a narrowed exit aperture. // Rev. Sci. Instrum. V.79, Issue 3. 2008.
  • S.S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, S. Y. Zuev. Multilayered structures based on La/B4C (B9C) for projection XUV-lithography at wavelength of 6.7 nm. Nuclear Instruments and Methods in Physics Research A. V..603. Issues 1−2. 2009. P. 80−82.
  • N.I. Chkhalo, E. B. Kluenkov, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, M. N. Toropov. Manufacturing of XEUV mirrors with sub-nanometer surface shape accuracy. Nuclear Instruments and Methods in Physics Research A. V..603. 2009. Issues 1−2. 2009. P. 62−65.
  • N.I. Chkhalo, A. E. Pestov, N. N., Salashchenko and M. N. Toropov (2010). Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities, Lithography, Michael Wang (Ed.), ISBN: 978−953−307−064−3, pp. 656, (p. 71−114) INTECH, Available from: http://sciyo.com/articles/ show/title/manufacturing-and-investigating-objective-lens-for-ultrahigh-resolution-lithography-facilities
  • M.M. Barysheva, B. A. Gribkov Yu. A. Vainer, M. V. Zorina, A. E. Pestov, Yu. Ya. Platonov, D. N. Rogachev, N. N. Salashchenko, N. I. Chkhalo. Problem of roughness detection for supersmooth surfaces. // Proc. of SPIE. V. 8076. Р. 80760M-1−10. 2011.
  • N.I. Chkhalo, M. N. Drozdov, S. A. Gusev, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, L. A. Shmaenok, N. N. Tsybin, B. A. Volodin. Freestanding multilayer films for application as phase retarders and spectral purity filters in the soft X-ray and EUV ranges. // Proc. of SPIE. V. 8076. Р. 80760O-1−11. 2011.
  • N.I. Chkhalo, M. M. Barysheva, A. E. Pestov, N. N. Salashchenko, M. N. Toropov. Manufacturing and characterization the diffraction quality normal incidence optics for the XEUV range. // Proc. of SPIE. V. 8076. Р. 80760P-1−13. 2011.
  • N.I. Chkhalo, M. N. Drozdov, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, L. A. Shmaenok, V. E. Banine, A. M. Yakunin. Free-standing spectral purity filters for EUV lithography. // Journal of Micro/Nanolithography, MEMS, and MOEMS, 11 (2), 021115−1−7. 2012.
  • N.I. Chkhalo, S. V. Golubev, D. A. Mansfeld, N. N. Salashchenko, L. A. Shmaenok and A. V. Vodopyanov. Source for EUVL based on plasma sustained by millimeter-wave Gyrotron radiation. // Journal of Micro/Nanolithography, MEMS, and MOEMS. 11 (2), 021123 (1−7).2012.
  • N.I. Chkhalo, S. Künstner, V. N. Polkovnikov, N. N. Salashchenko, F. Schäfers, S. D. Starikov. High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography // Appl. Phys. Lett. 2013. V.1020. P.011602.
  • N. I. Chkhalo and N. N. Salashchenko. Next generation nanolithography based on Ru/Be and Rh/Sr multilayer optics. // AIP ADVANCES Vol.3, Issue 8, 082130 (1−9) (2013)
  • M.M.Barysheva, N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, M. V. Zorina. Mirrors with a Sub-Nanometer Surface Shape Accuracy./ // Fundamentals of Picoscience/ Klaus D. Sattler (Ed.) — Taylor & Francis Group, 2013. —  Рр. 595−615. CRC Press 2013. Print ISBN: 978−1−4665−0509−4. eBook ISBN: 978−1−4665−0510−0

Сontact detail

Phone: +7 (831) 417−94−58

E-mail: salashch@ipmras.ru

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