IPM RAS / Structure / Staff / Lopatin Alex

Lopatin Alex

Research associate of the multilayer X-ray optics Department.

Personal data

Born on 05.09.1972, Nizhniy Novgorod.

Research interests

Layered absorption and polarizing filters for soft x-ray and extreme ultraviolet (ЭУФ) area, the projection ЭУФ lithograph

Education

1989 - 1995. - Advanced School of General and Applied Physics of N. I. Lobachevsky State University of Nizhniy Novgorod.

Career

1995 - 2009. - trainee researcher, junior research associate, research associate of the IPM RAS.

Publications

  • Application of free-standing multilayer films as polarizers for X-ray radiation / Andreev S. S., Bibishkin M. S., Chkhalo N. I., Lopatin A. Ya., Luchin V. I. Pestov, A. E., K. A. Prokhorov, N. Salashchenko n, Nuclear Instruments and Methods in Physics Research A543, 340 (2005).
  • Multilayer Zr/Si filters for EUV lithography and for radiation source readouts / Bibishkin M. S., Chkhalo N. I., S. A. Gusev, Kluenkov E. b., Lopatin A. Ya., Luchin V. I. Pestov, A. E., Salashchenko N. N., Shmaenok L. A., Tsybin N. N., Zuev S. Y., Proc. SPIE 7025, 702502 (2008).
  • Contact detail

    Phone: +7 (831) 417-94-76 +123

    E-mail: lopatin@ipmras.ru

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